Introduction產品簡介

3M氟化液FC-40是無色透明全氟化學品，具有良好的化學惰性、電氣絕緣性能、熱傳導性和的第表面張力應用于半導體制造廠作為熱傳導介質。其液體溫度范圍為-57°C 至 155°C，主要應用于蝕刻設備、離子注入設備、測試設備及其他設備。因為FC-40是單一組分，所以其成分不好出現降解或者過期。FC-40沸點高，其隨時間的揮發也比較少。

3M Fluorinert Electronic Liquid FC-40 is a clear, colorless, thermally stable, fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-57°C to 155°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-40 is primarily a single compound, its composition will not shift or fractionate with time. This keeps fluid loss to a minimum and insures that transport properties will not change with time.

Physical Properties物理化學性質

Not for specication purposes All values determined at 25°C unless otherwise speci?ed