The MS9000 vibration sensor is a single axis MEMS capacitive accelerometer based on a bulk micro-machined silicon element

specifically designed for large and flat frequency response, a low power ASIC for signal conditioning, a micro-controller for storage of

compensation values and a temperature sensor. The product is low power, fully calibrated, robust and extremely stable and the

electronic configuration provides a solid power on reset and ensures a full protection against brown-out…

It operates from a single power supply voltage (between + and +) with low current consumption (< at 5v). the output

is a ratiometric analog voltage that varies between + and + for the full-scale acceleration range at a voltage supply of +5V.

The sensor is fully self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity.

Accelerometer specifications All values are specified at +20°C (+68°F) and VDC supply voltage, unless otherwise stated