3D激光共聚焦形貌顯微鏡是一種高速共焦激光掃描顯微鏡（CLSM），用于可靠的三維測(cè)量，從一系列光學(xué)剖切圖像中提供目標(biāo)物體的三維描述，通過(guò)該算法，橫截面圖像被直接轉(zhuǎn)換為三維輪廓數(shù)據(jù)。這種的原始截面圖像，直觀地解釋，使表面輪廓數(shù)據(jù)優(yōu)于其他光學(xué)技術(shù)。
3D激光共聚焦形貌顯微鏡特點(diǎn)
-高分辨率無(wú)損光學(xué)三維測(cè)量
-實(shí)時(shí)共焦成像
-各種光學(xué)變焦
-同時(shí)亮場(chǎng)和共焦成像
-具有精細(xì)自動(dòng)聚焦的自動(dòng)增益搜索
-傾斜補(bǔ)償
-簡(jiǎn)易分析模式
-精密可靠的高速測(cè)高
-通過(guò)半透明基板檢查特征
-無(wú)樣品制備
-寬范圍檢測(cè)的圖像拼接
3D激光共聚焦形貌顯微鏡應(yīng)用
-半導(dǎo)體：IC圖形，凸點(diǎn)高度，線圈高度，缺陷檢查，CMP工藝
-FPD產(chǎn)品：觸摸屏檢查，ITO圖案，LCD柱墊高度
-MEMS器件：結(jié)構(gòu)的三維輪廓，表面粗糙度，MEMS圖形
-玻璃表面：薄膜太陽(yáng)能電池，太陽(yáng)能電池紋理，激光圖案
-材料研究：模具表面檢查，粗糙度，裂紋分析
3D激光共聚焦形貌顯微鏡測(cè)量表面粗糙度
3D激光共聚焦形貌顯微鏡規(guī)格參數(shù)
| 型號(hào) | 顯微鏡 | NS-3600 | Remark | |||
|---|---|---|---|---|---|---|
| 物鏡放大倍數(shù) | 10× | 20× | 50× | 100× | ||
| 觀察/ 測(cè)量范圍 | 水平 (H): μm | 1400 | 700 | 280 | 140 | |
| 豎直 (V): μm | 1050 | 525 | 210 | 105 | ||
| 工作距離: mm | 17.5 | 4.5 | 1.0 | 1.0 | ||
| 數(shù)值孔徑 (N.A.) | 0.30 | 0.45 | 1.0 | 1.0 | ||
| 觀察/測(cè)量的光學(xué)系統(tǒng) | 小孔聚焦光學(xué)系統(tǒng) | |||||
| Height Measurement | Measuring scan range | 10 mm | ||||
| Display resolution | 0.001 μm | |||||
| Repeatability σ | 0.02 μm | Note 1 | ||||
| Width measurement | Display resolution | 0.001 μm | ||||
| Repeatability 3σ | 0.03 μm | Note 2 | ||||
| Frame memory | Pixel count | 1024x1024, 1024×768, 1024×384, 1024×192, 1024×96 | ||||
| For confocal image | 12 bit | |||||
| For color image | 8-bit for RGB each | |||||
| For height measurement | 16 bit | |||||
| Frame rate | Surface scan | 20 Hz to 160 Hz | ||||
| Line scan | ~8 kHz | |||||
| Laser beam light source for confocal measurement | Wavelength | Red laser, 638 nm | ||||
| Output | ~2 mW | |||||
| Laser Class | Class 3b | |||||
| Laser light-receiving element | PMT (photomultiplier tube) | |||||
| Light source for optical observation | Lamp | LED | ||||
| Color camera for Optical observation | Imaging element | Color CCD image sensor | ||||
| Recording resolution | 1296x966 | |||||
| Data processing unit | Dedicated PC | |||||
| Power supply | Power-supply voltage | 100 to 240 VAC, 50/60 Hz | ||||
| Current consumption | 500 VA max. | |||||
| Weight | Microscope | Approx. ~50 kg (Measuring head unit : ~12.5 kg) | ||||
| Controller | ~8 kg | |||||
| Vibration isolating system | Pneumatic isolator | |||||
Note 1 :
100 times measurement of standard sample (1μm step height) with 100× / 0.9 objective.
Note 2 :
100 times measurement of standard sample (5μm pitch) with 100× / 0.9 objective.
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